Precision Nanometrology
Gao, Wei
| Autor: | Gao, Wei |
|---|---|
| Themengebiete: | Messtechnik Meteorologie Witterung |
| Veröffentlichungsdatum: | 28.06.2010 |
| EAN: | 9781849962537 |
| Auflage: | 2010 |
| Sprache: | Englisch |
| Seitenzahl: | 368 |
| Produktart: | Gebunden |
| Verlag: | Springer Springer-Verlag London Ltd. Springer London |
| Untertitel: | Sensors and Measuring Systems for Nanomanufacturing |
Produktinformationen "Precision Nanometrology"
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: ¿ error separation algorithms and systems for measurement of straightness and roundness, ¿ the measurement of micro-aspherics, ¿ systems based on scanning probe microscopy, and ¿ scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Sie möchten lieber vor Ort einkaufen?
Sie haben Fragen zu diesem oder anderen Produkten oder möchten einfach gerne analog im Laden stöbern? Wir sind gerne für Sie da und beraten Sie auch telefonisch.
Juristische Fachbuchhandlung
Georg Blendl
Parcellistraße 5 (Maxburg)
8033 München
Montag - Freitag: 8:15 -18 Uhr
Samstags geschlossen