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Polycrystalline Silicon for Integrated Circuit Applications

160,49 €*

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Produktnummer: 18098da8ff4ebc4dc886e7ea0ff5273911
Autor: Kamins, Ted
Themengebiete: Phase Potential Sensor integrated circuit interconnect model thermodynamics transistor
Veröffentlichungsdatum: 31.01.1988
EAN: 9780898382594
Sprache: Englisch
Seitenzahl: 290
Produktart: Gebunden
Verlag: Springer US
Produktinformationen "Polycrystalline Silicon for Integrated Circuit Applications"
Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor mance. As device performance improves, however, some of the proper ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili con also need to be better understood to minimize potential degradation of circuit behavior.
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